Metrology

Woollam Ellipsometer WVASE32
The WVASE32 is a variable angle (60–90 degrees) spectroscopic ellipsometer. Measurements are performed in the wavelength range 420nm – 780 nm. This tool is used to determine thin film thickness and optical constants. The software supports data modeling and fitting for single film problems to complex multi-layer samples

Rudolph AutoEL II Ellipsometer
The Rudolph is a single wavelength ellipsometer using the 632.8 nm line of a He:Ne laser for measuring thickness and refractive index of thin dielectric films.

Dektak IIA Profilometer
The Dektak is a surface profilometer that can measure topography with a scan length of 1 – 5 mm and about 10 nm vertical resolution. The maximum step height is 30 microns.

Filmetrics F20
A reflectance spectrometer for measuring the thickness and optical constants (n and k) of thin dielectric films and multi-layers.