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Metrology
| Woollam
Ellipsometer WVASE32 |
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The
WVASE32 is a variable angle (60–90 degrees) spectroscopic
ellipsometer. Measurements are performed in the wavelength
range 420nm – 780
nm. This tool is used to determine thin film thickness and optical
constants. The software supports data modeling and fitting for
single film problems to complex multi-layer samples |
| Filmetrics
F20 |
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A reflectance spectrometer for measuring the thickness
and optical constants (n and k) of thin dielectric films and multi-layers. |
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