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The ASU NanoFab laboratories contain a broad spectrum of device processing and characterization equipment. The laboratories are managed as a flexible foundry and we are used to working with a wide range of different materials and processes. Commonly used tools are collected together, for example within our 4,000 square foot cleanroom. Other specialized tools, such as electron beam lithography, are housed in separate cleanrooms or laboratories.
- Cleanroom Tools
- Electrical Characterization
- Electron Beam Lithography
- Field Emission Scanning Electron Microscopy
- CSSER Facility Fees
