DEPOSITION

• Lesker #2 ZnO Sputter Tool
• Parylene Coater
• PlasmaQuest RPCVD

DIFFUSION

• Furnaces
• Wet Oxide Diffusion
• Dry Oxide Diffusion

ETCH

• PlasmaLab RIE #2
• PlasmaLab 80+ RIE (Cloey)
• PlasmaLab 80+ RIE (Floey)
• Tegal Asher #1
• Tegal Asher #2

PHOTO

• EVG620 Aligner
• Heidelberg Laser Writer
  • Development Etch Process 10/07
  • Convert Pictures
  • Guidelines for Conversion 10/07
• Karl Suss Aligner
• Photo Repeater
  • Chrome Development Process
• SCS Spinner

METALS

• CHA #1
• Edwards #2
• Lesker #1 PVD75 Sputterer
• Lesker #3 E-beam
• Thermal Evaporator
• TorrVac E-Beam Evaporator

METROLOGY

• Filmetrics F-40
• MDC CV Station
• P2 Profilometer
• Woollam Ellipsometer

OTHER

• Electron Beam Lithography
• Ergolux Microscope
• FESEM - Hitachi S-4700-II
• HeatPulse 610
• Jeol 840 SEM
• Tamarack RTP

All of the procedures listed above are in .pdf format. If you can't read them, please download Adobe Acrobat Reader below.