Basic cleanroom information for faculty & students

1. Go to ERC 115 and sign up in the book so you are added to the CSSER distribution list to receive pertinent emails.  You should print a copy of the CSSER Safety Handbook (you will need this for the Safety Class) at http://www.fulton.asu.edu/fulton/csser/safety.php.
2. Take the cleanroom safety class and test, you must score 80% or better to pass. The class is usually given the last week of every month.  Sign up on the board outside ERC 151 the week before the class.
3. Your advisor must authorize you for training by entering an account number and project summary at https://fultonapps.asu.edu/csser/.  (They will need the student’s ASUrite ID in order to submit).
4. Once approved for training, the student should logon to https://fultonapps.asu.edu/csser/ and choose “Orientation” and "Wet Benches" from the drop down menu. A CSSER staff member will contact you to schedule Orientation, which must be taken before any tool training. After you have receive Orientation and Wet Benches training, please logon to http://www.fulton.asu.edu/sr to request "CSSER User" be added to your profile in the Fulton Domain. This will give you access to certain computers in the cleanroom for general use.
5. Tool training is scheduled the same way. You may sign up for training on 3 tools concurrently. Tool training is not instantaneous, as there may be others ahead of you. Some tools take considerable time to become proficient in operating them.
6. A cleanroom note book may be obtained from Lab Stores.  Be sure it has clean room paper!   You will need an account number from your advisor to pay for it.
7. If you are designing a mask, you will need to be proficient in a CAD program prior to starting the circuit design.  The program must be able to output files in .dxf or .gdsII format.   If you need to make your own masks, there are additional steps to follow.  For more information, contact Art Handugan at 727-7143.
8. Training times are specific and will be cancelled if you are late.
9. Once you are trained on a tool that is on a networked computer, please logon to http://www.fulton.asu.edu/sr to request the specific tool be added to your profile in the Fulton Domain.
10. CSSER staff is here to assist you and answer questions about the cleanroom.

The sequence for training is generally as follows: 

1. Orientation
2. Wet benches
3. Metrology Suite (Woollam SE, Filmetrics F-20 and F-40, Tencor P2 Profilometer, Veeco 4-point probe)*
4. Spinner training
5. Lithography exposure tools (Suss and/or EV620)
6. Etching/Plasma tools (RIE or wet etch)
7. Metal deposition

The specific tools you will need to learn will be determined by the process you are running.  This sequence is generic, but is a good general guideline.  There is a range of additional process tools in the cleanroom, which you may need to get trained on.

NOTE: Training will be rescheduled if you are 15 minutes late or more. After two no-shows or 2 rescheduled training sessions, an email reminder will be sent to you and your faculty advisor. After the third time, the training request will be canceled and will need to be re-submitted.

* As of October 6, 2008, we are offering the entire Metrology Suite as a single training event. This training may take up to 2 hours. Please check the on-line training database for scheduled times.